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Title

Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses

Author(s)

Day, Daniel;  Gu, Min

Abstract

Abstract not reproduced here by request of the publisher. The text is available from: http://dx.doi.org/10.1117/12.638336.

Publication type

Conference paper

Research centre

Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Centre for Micro-Photonics

Source

Proceedings of the Device and Process Technologies for Microelectronics, MEMS, and Photonics IV Conference, Brisbane, Australia, 12 December 2005 / Jung-Chih Chiao, Andrew S. Dzurak, Chennupati Jagadish, David V. Thiel (eds.), Vol. 6037

Publication year

2006

Keyword(s)

Femtosecond;  Microchannels;  Microfabrication

Publisher

SPIE - International Society for Optical Engineering

Publisher URL

http://dx.doi.org/10.1117/12.638336

Copyright

Copyright © 2006 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 6037), and is available from: http://dx.doi.org/10.1117/12.638336. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Full text

Peer reviewed