Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/55903

Title

Fabrication of x-ray spiral masks by laser ablation

Author(s)

Peele, Andrew G.;  Nugent, Keith A.;  McMahon, Phillip J.;  Paterson, David;  Tran, Chanh Q.;  Mancuso, Adrian;  Mackin, Tracy R.;  Hayes, Jason P.;  Harvey, Erol C.;  McNulty, Ian

Abstract

The manipulation of x-rays by phase structures is becoming more common through devices such as compound refractive lenses, blazed zone-plates and other structures. A spiral phase modulation structure can be used to condition an x-ray beam to produce an x-ray vortex. An x-ray beam in this form can be used as the first step towards a self-collimating beam. Also it can be used as a controllable pathological feature in studies of x-ray phase retrieval. We describe the microfabrication of a spiral phase modulation structure by excimer laser ablation. A multi-step fabrication using 15 separate chrome-on-quartz mask patterns is used to create a 16 step spiral staircase structure approximately the desired spiral ramp. The results of simulations and initial experimental results are presented.

Publication type

Conference paper

Research centre

Swinburne University of Technology. Industrial Research Institute Swinburne

Source

Proceedings of SPIE: 'Design and Microfabrication of Novel X-Ray Optics', Seattle, Washington, United States, 09-10 July 2002 / D. C. Mancini (ed.), Vol. 4783, pp. 115-122

Publication year

2002

FOR Code(s)

0205 Optical Physics

Keyword(s)

Excimer lasers;  Laser ablation;  Microfabrication;  Optical devices;  Phase;  Phase modulation;  Phase structures;  X ray optics;  X ray spiral masks

Publisher

SPIE

ISSN

0277-786X

Publisher URL

http://dx.doi.org/10.1117/12.451024

Copyright

Copryight © 2002 SPIE.

Peer reviewed