Design, modeling and fabrication of piezoelectric polymer actuators

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/55955

Title: Design, modeling and fabrication of piezoelectric polymer actuators
Author(s): Fu, Yao; Harvey, Erol C.; Ghantasala, Muralidhar K.; Spinks, Geoff
Abstract: Abstract not reproduced here by request of the publisher. The text is available from: http://dx.doi.org/10.1117/12.527885.
Publication type: Conference paper
Research centre: Swinburne University of Technology. Industrial Research Institute Swinburne
Source: Proceedings of SPIE: 'Device and Process Technologies for MEMS, Microelectronics, and Photonics III', Perth, Western Australia, Australia, 10-12 December 2003 / Jung-Chih Chiao, Alex J. Hariz, David N. Jamieson, Giacinta Parish and Vijay K. Varadan (eds.), Vol. 5276, pp. 113-118
Publication year: 2004
FOR Code(s): 0205 Optical Physics
Keyword(s): Actuator; Actuators; Design parameters; Electroplated products; Electroplating; Laser beams; Laser micromachining; Micromachining; Nickel alloys; Optimization; Parameter estimation; Piezoelectric materials; Piezoelectric polymers; Punching; PVDF composite cantilever; Polymers; Simulation
Publisher: SPIE
ISSN: 0277-786X
Publisher URL: http://dx.doi.org/10.1117/12.527885
Peer reviewed