KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/72085

Title: KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures
Author(s): Chong, H. W.; Mitchell, A.; Hayes, J. P.; Austin, Michael W.
Abstract: An investigation of the micromachining of trenches in lithium niobate (LiNb03) using direct imaged 248 nm KrF excimer laser ablation is presented. Trenches 20 fim wide and 0.5-7.5 fim deep have been produced. These trenches are assessed and are deemed suitable for the machining of integrated electro-optic structures. Based on the characterized ablation conditions, trenches of high quality have been successfully fabricated on an X-cut optical modulator which is potentially important for the realization of efficient broadband optical intensity modulators.
Publication type: Journal article
Research centre: Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Industrial Research Institute Swinburne
Source: Journal of Micro/Nanolithography, Microfabrication and Microsystems, Vol. 1, no. 2 (Jul 2002), pp. 117-122
Publication year: 2002
Keyword(s): Ablation; Laser trenching; Lithium niobate; Optical modulators; Surface machining
Publisher: SPIE
ISSN: 1537-1646
Publisher URL: http://dx.doi.org/10.1117/1.1484160
Peer reviewed