Investigation of KrF excimer laser ablation and induced surface damage on lithium niobate

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/72574

Title: Investigation of KrF excimer laser ablation and induced surface damage on lithium niobate
Author(s): Chong, Han-Woo; Mitchell, Arnan; Hayes, Jason P.; Austin, Michael W.
Abstract: An investigation of the use of KrF pulsed excimer laser surface machining of X-cut lithium niobate is presented. Trenches of 20 μm width were formed using a wide range of laser fluences and number of pulses. These trenches were analysed in terms of ablation rate, ablation depth and in particular, laser-induced surface damage. Different forms of observed surface damage have been analysed using SEM imaging and categorised. Possible mechanisms for the damage types are proposed. The effect of depositing a silicon dioxide overlayer on the sample prior to ablation is examined resulting in significant improvement in the quality of the ablated patterns with minimal reduction of ablation rate.
Publication type: Journal article
Research centre: Swinburne University of Technology. Industrial Research Institute Swinburne
Source: Applied Surface Science, Vol. 201, no. 1-4 (Nov 2002), pp. 196-203
Publication year: 2002
Keyword(s): Excimer laser ablation; Excimer lasers; Krypton; Laser ablation; Lithium niobate; SiO2 overlayer; Surface damage
Publisher: Elsevier
ISSN: 0169-4332
Publisher URL: http://dx.doi.org/10.1016/S0169-4332(02)00904-2
Peer reviewed