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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/1659
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- Design and fabrication of a hybrid actuator
- Fu, Yao; Ghantasala, Muralidhar K.; Harvey, Erol C.; Qin, Lijiang
- The necessity to reduce the size of actuators and at the same time increase the force and the air gap has placed severe constraints on the suitability of current microactuator technology for various applications. This has led to the development of new actuator technologies based on novel materials or modifying existing systems. As an effort in this direction, we are reporting on the design and fabrication of a hybrid actuator employing a combination of electromagnetic and piezoelectric actuation methods for the first time. This actuator was designed and optimized by using the piezoelectric and electromagnetic solvers of commercially available FEM software packages (CoventorWare and ANSYS). The device consists of a shaped piezoelectric composite cantilever on the top and a copper coil wound around a permalloy core assembled on a silicon substrate with a permanent magnet at the bottom. The composite cantilever consists of polarized piezoelectric polymer polyvinylidene fluoride (PVDF) with an electroplated permalloy layer on one side. Microstructures in the required shape are introduced using novel methodologies including laser micromachining and microembossing. The hybrid actuator has been fabricated and tested using standard testing procedures. The experimental data are compared with the simulation results from both the finite element methods and the analytical model. There is excellent agreement between the results obtained in simulation and by experiment. A maximum total deflection of 400 µm with a typical contact force of 200 µN has been achieved.
- Publication type
- Journal article
- Research centre
- Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Industrial Research Institute Swinburne
- Smart Materials and Structures, Vol. 14, no. 4 (2005), pp. 488-495
- Publication year
- IOP Publishing
- Publisher URL
- Copyright © 2005 IOP Publishing Ltd. Reproduced in accordance with the copyright policy of the publisher.