Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.
Materials Science and Engineering A: Structural Materials: Properties, Microstructures and Processing,
Vol. 344, no. 1-2 (Mar 2003), pp. 365-367