High aspect-ratio micromachining of polymers with an ultrafast laser

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/1952

Title: High aspect-ratio micromachining of polymers with an ultrafast laser
Author(s): Endo, Akira; Hannaford, Peter; Harvey, Erol C.; Lowe, Ralph M.; Zhang, Yanping
Abstract: Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20-40 μm and depths 300-400 μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 μm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.
Publication type: Journal article
Research centre: Swinburne University of Technology. School of Biophysical Science and Electrical Engineering
Source: Applied surface science, Vol. 186 (2002), pp. 345-351
Publication year: 2002
Publisher: Elsevier
Format: pp. 345-351
ISSN: 0169-4332
Publisher URL: Applied surface science
Publisher URL: http://dx.doi.org/doi:10.1016/S0169-4332(01)00673-0
Peer reviewed