Effect of ion bombardment on the properties of magnetron sputtered samarium cobalt films on chromium underlayers

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Effect of ion bombardment on the properties of magnetron sputtered samarium cobalt films on chromium underlayers

Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/148904

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Title: Effect of ion bombardment on the properties of magnetron sputtered samarium cobalt films on chromium underlayers
Author(s): Ghantasala, Muralidhar K.; Wang, James; Perooly, Soma
Abstract: This paper presents the results of our investigations on the deposition and characterization of SmCo films on chromium under layers deposited on single crystal silicon substrates. The effects of low energy ions bombarding the growing films on the composition, surface morphology, (micro) structure, and magnetic properties of the SmCo films have been investigated using Rutherford Backscattering Spectrometry (RBS), Atomic Force Microscopy (AFM), X-ray Diffraction (XRD) and Superconducting Quantum Interference Device (SQUID) respectively. The films were deposited on a Cr underlayer at 600 °C and at a pressure of 10 mTorr with an applied substrate bias varying from 0 to -100 V. The results indicate that as the substrate bias voltage increases, the magnetic properties of the films are enhanced due to smaller grain sizes, better packing density, and improved crystallinity. At a substrate bias voltage of - 60 V both saturation and remnant magnetizations reach maximum values at about 9.30 kG and 7.12 kG, respectively, with an intrinsic coercivity, iHc, of 11.64 kOe. The SmCo films exhibited predominantly Sm2Co17 phase (2:17 phase) with (110) orientation. As the substrate bias voltage is further increased, the magnetic properties of the films are deteriorated due to relatively larger grain sizes, decreased density of magnetic phases and poor crystallinity.
Publication type: Conference paper
Research centre: Swinburne University of Technology. Faculty of Engineering and Industrial Sciences
Source: Proceedings of 'Multifunctional Materials: Working Smarter Together', the 40th Society for the Advancement of Material and Process Engineering Fall Technical Conference (SAMPE 2008), Memphis, United States, 08-11 September 2008
Publication year: 2008
Keyword(s): Coatings; Evaluation; Fabrication; Films; Manufacturing; Plating materials; Processing; Testing
Publisher: Society for the Advancement of Material and Process Engineering
ISBN: 9781934551042, 193455104X
Publisher URL: http://www.sampe.org/
Peer reviewed