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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/192794
- Title
- Laser processing of sapphire by strongly focused femtosecond pulses
- Author(s)
- Juodkazis, Saulius; Misawa, Hiroaki
- Abstract
- The high-temperature annealing (1500°C for 15 min) of the shock-amorphized and compressed sapphire around the voids rendered the amorphous sapphire insoluble in aqueous solution of hydrofluoric acid. There were no observable back relaxation and reflow of the compressed amorphous phase. The overlapping of femtosecond pulses by >70% of the focal diameter also made the photomodified regions insoluble in aqueous solution of hydrofluoric acid. Femtosecond laser cutting of hard dielectric materials is discussed.
- Publication type
- Journal article
- Source
- Applied Physics A: Materials Science and Processing, Vol. 93, no. 4 (Dec 2008), pp. 857-861
- Publication year
- 2008
- FOR Code(s)
- 0204 Condensed Matter Physics
- Keyword(s)
- Annealing; Femtosecond lasers; Femtosecond pulses; Sapphire; Shock-amorphization
- Publisher
- Springer
- ISSN
- 0947-8396
- Publisher URL
- http://dx.doi.org/10.1007/s00339-008-4763-0
- Copyright
- Copyright © Springer-Verlag 2008.
- Additional information
- The authors acknowledge support from the Grant-in-Aid from the Ministry of Education, Science, Sports, and Culture of Japan No.19360322.
- Peer reviewed
