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Title

Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8

Author(s)

Seet, Kock Khuen;  Juodkazis, Saulius;  Jarutis, Vygandas;  Misawa, Hiroaki

Abstract

The universal scaling of a width of photopolymerized line on the exposure dose was observed in polymerization by direct laser writing using tightly focused femtosecond pulses in SU 8 resist. This scaling can be explained as the photopolymerization by a blackbody-type emission. A spectrally broad thermal emission of electrons heated up to temperatures approximately Te ∼ 103 K coincides with an IR-absorption band of SU-8 centered at the 2.9 μm and had caused polymerization by a cumulative direct absorption. Three-dimensional photonic crystal templates with approximately twice reduced feature size were fabricated with stop band at the fiber communication wavelength of 1.3 μm.

Publication type

Journal article

Source

Applied Physics Letters, Vol. 89, no. 2 (Jul 2006), paper no. 024106

Publication year

2006

FOR Code(s)

01 Mathematical Sciences;  02 Physical Sciences;  09 Engineering

Keyword(s)

Direct laser writing;  Femtosecond pulses;  Optical curing;  Photonic crystals;  Photopolymerization;  SU-8

Publisher

American Institute of Physics

ISSN

0003-6951

Publisher URL

http://dx.doi.org/10.1063/1.2221499

Copyright

Copyright © 2006 American Institute of Physics. Published version of this paper reproduced here in accordance with the copyright policy of the publisher.

Full text

Peer reviewed