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Title

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Author(s)

Juodkazis, Saulius;  Nishimura, Koichi;  Okuno, Hiroki;  Tabuchi, Yusuke;  Matsuo, Shigeki;  Tanaka, Satoru;  Misawa, Hiroaki

Abstract

Abstract not reproduced here by request of the publisher. The text is available from http://dx.doi.org/10.1117/12.751889

Publication type

Conference paper

Source

Proceedings of 'Laser-assisted Micro- and Nanotechnologies', the SPIE International Conference on Lasers, Applications, and Technologies, Minsk, Belarus, 28 May - 01 June 2007 / Vladislav Panchenko, Oleg Louchev and Sergei Malyshev (eds.), Vol. 6732, paper no. 67320B

Publication year

2007

Keyword(s)

Ablation;  Dielectric breakdown;  Field enhancement;  Laser microfabrication;  Light extraction;  Ripples

Publisher

SPIE

ISSN

0277-786X (series ISSN)

ISBN

9780819468901, 0819468908

Publisher URL

http://dx.doi.org/10.1117/12.751889

Copyright

Copyright © 2007 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 6732), and is available from: http://dx.doi.org/10.1117/12.751889. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Additional information

The authors acknowledge support from the Grant-in-Aid for scientific research Kiban-B(2) No.19360322.

Full text

Peer reviewed