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Title

Nanofabrication by direct laser writing and holography

Author(s)

Seet, Kock Khuen;  Jarutis, Vygandas;  Juodkazis, Saulius;  Misawa, Hiroaki

Abstract

Abstract not reproduced here by request of the publisher. The text is available from http://dx.doi.org/10.1117/12.660605

Publication type

Conference paper

Source

Proceedings of the SPIE Optomechatronic Micro/Nano Devices and Components Conference, Sappora, Japan, 05-07 December 2005 / Yoshitada Katagiri (ed.), Vol. 6050, paper no. 60500S

Publication year

2005

Keyword(s)

Direct laser writing;  Femtosecond laser microfabrication;  Holographic recording;  Microfabrication;  Nanofabrication;  Photonic crystals

Publisher

SPIE

ISBN

0277-786X (series ISSN)

Publisher URL

http://dx.doi.org/10.1117/12.660605

Copyright

Copyright © 2005 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 6050), and is available from: http://dx.doi.org/10.1117/12.660605. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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