This paper describes femtosecond laser lithography of 3-D photonic crystal templates in commercial photoresist SU-8 and replication of these templates with silicon. Using this approach, silicon-based photonic crystals having 3-D square spiral architecture and exhibiting photonic stop gaps near the 2.5-µm wavelength were fabricated. Possibilities to use a multiple-beam interference technique for two-photon absorption templating of photonic crystals are explored.
IEEE Journal of Selected Topics in Quantum Electronics,
Vol. 14, no. 4 (Jul-Aug 2008), pp. 1064-1073