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Title

Templating and replication of spiral photonic crystals for silicon photonics

Author(s)

Seet, Kock Khuen;  Mizeikis, Vygantas;  Kannari, Kenta;  Juodkazis, Saulius;  Misawa, Hiroaki;  Tetreault, Nicolas;  John, Sajeev

Abstract

This paper describes femtosecond laser lithography of 3-D photonic crystal templates in commercial photoresist SU-8 and replication of these templates with silicon. Using this approach, silicon-based photonic crystals having 3-D square spiral architecture and exhibiting photonic stop gaps near the 2.5-µm wavelength were fabricated. Possibilities to use a multiple-beam interference technique for two-photon absorption templating of photonic crystals are explored.

Publication type

Journal article

Source

IEEE Journal of Selected Topics in Quantum Electronics, Vol. 14, no. 4 (Jul-Aug 2008), pp. 1064-1073

Publication year

2008

FOR Code(s)

0205 Optical Physics;  0906 Electrical and Electronic Engineering

Keyword(s)

Femtosecond laser lithography;  Photonic band gap;  Silicon

Publisher

IEEE

ISSN

1077-260X

Publisher URL

http://dx.doi.org/10.1109/jstqe.2008.922909

Copyright

Copyright © 2008 IEEE. Published version of this paper reproduced here in accordance with the copyright policy of the publisher. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Full text

Peer reviewed