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Title

Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications

Author(s)

Juodkazis, Saulius;  Mizeikis, Vygantas;  Misawa, Hiroaki

Abstract

Femtosecond laser fabrication of three-dimensional structures for photonics applications is reviewed. Fabrication of photonic crystal structures by direct laser writing and holographic recording by multiple beam interference techniques are discussed. The physical mechanisms associated with structure formation and postfabrication are described. The advantages and limitations of various femtosecond laser microfabrication techniques for the preparation of photonic crystals and elements of microelectromechanical and micro-optofluidic systems are discussed.

Publication type

Journal article

Source

Journal of Applied Physics, Vol. 106, no. 5 (Sep 2009), article no. 051101

Publication year

2009

FOR Code(s)

01 Mathematical Sciences;  02 Physical Sciences;  09 Engineering

Keyword(s)

Direct laser writing;  Femtosecond laser fabrication;  Femtosecond lasers;  Holographic recording;  Microfabrication;  Photonic crystals

Publisher

American Institute of Physics

ISSN

0021-8979

Publisher URL

http://dx.doi.org/10.1063/1.3216462

Copyright

Copyright © 2009 American Institute of Physics. Published version of this paper reproduced here in accordance with the copyright policy of the publisher.

Full text

Peer reviewed