Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/193412

Title

Freestanding and movable photonic microstructures fabricated by photopolymerization with femtosecond laser pulses

Author(s)

Sun, Quan;  Juodkazis, Saulius;  Murazawa, Naoki;  Mizeikis, Vygantas;  Misawa, Hiroaki

Abstract

We present a method to fabricate freestanding and movable photonic microstructures by photopolymerization in a zirconium-based sol-gel hybrid resist with femtosecond laser three-dimensional (3D) direct writing. The freestanding microstructures exhibit much less distortion than the conventional structures attached to substrates, especially when made at close to the photopolymerization threshold. A few percent shrinkage which exists rescales the structure and it can lead to the shift of the photonic stop band toward shorter wavelengths. Fabrication of freestanding and freely movable (in micro-fluidic environment) 3D microstructures realizes a simple approach to quantitatively study the shrinkage of photopolymers and to improve the resolution. 3D-movable micro-optical elements with designed photonic properties and micro-devices have potential in opto-fluidics and opto-micro-mechanical applications based on laser trapping and manipulation.

Publication type

Journal article

Source

Journal of Micromechanics and Microengineering, Vol. 20, no. 3 (Mar 2010), article no. 035004

Publication year

2010

FOR Code(s)

0915 Interdisciplinary Engineering

Keyword(s)

Femtosecond laser pulses;  Photonic microstructures;  Photopolymerization

Publisher

Institute of Physics Publishing

ISSN

0960-1317

Publisher URL

http://dx.doi.org/10.1088/0960-1317/20/3/035004

Copyright

Copyright © 2010 IOP Publishing Ltd.

Peer reviewed