Nano-textured metallic surfaces for optical sensing and detection applications

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Nano-textured metallic surfaces for optical sensing and detection applications

Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/193353

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Title: Nano-textured metallic surfaces for optical sensing and detection applications
Author(s): Yokota, Yukie; Ueno, Kosei; Juodkazis, Saulius; Mizeikis, Vygantas; Murazawa, Naoki; Misawa, Hiroaki; Kasa, Haruya; Kintaka, Kenji; Nishii, Junji
Abstract: This work describes fabrication of three-dimensionally nano-textured silicon surface structures metalized by thin gold films, and their application for optical sensing and detection of solute molecules utilizing surface-enhanced Raman scattering (SERS) effect. Two types of sensitive surfaces were prepared by different techniques. The first of them was a checkerboard pattern of 3D nanoblocks defined in compact areas on the surface of a silicon wafer using highly accurate electron-beam lithography (EBL) technique, and fabricated by dry reactive-ion etching (RIE) technique with subsequent metalization of the surface by gold sputtering. The second type of sensitive surface consisted of a square array of nano-apertures, defined on a large area of the silicon surface by a less accurate but simpler ultraviolet holographic lithography, and subsequently fabricated in a sequence of dry and wet etching as well as gold sputtering steps. The fabricated structures were found to exhibit significant near-field enhancement, as evidenced by strong SERS signal from the sensors immersed in aqueous pyridine solutions with concentrations as low as 10 -9 M due to the presence of well-defined 3D periodic texture of the structure.
Publication type: Journal article
Source: Journal of Photochemistry and Photobiology A: Chemistry, Vol. 207, no. 1 (Sep 2009), pp. 126-134
Publication year: 2009
FOR Code(s): 0306 Physical Chemistry (Incl. Structural); 0904 Chemical Engineering
Keyword(s): Holographic lithography; Laser processing; Metallic nano-structures; Plasmons; Surface-enhanced Raman scattering
Publisher: Elsevier
ISSN: 1010-6030
Publisher URL: http://dx.doi.org/10.1016/j.jphotochem.2008.10.007
Peer reviewed