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Title

A study of hot embossed microchannels using confocal microscopy

Author(s)

Simdikova, Irina;  Kueper, Armin;  Sbarski, Igor;  Harvey, Erol C.;  Hayes, Jason P.

Abstract

Micro molding and hot embossing are among the most popular techniques for fabricating microstructures in polymeric materials, due to the relatively low cost of replication. In this paper we present an investigation of a hot embossing process including the optimisation of operating parameters for polystyrene (PS) and polycarbonate (PC) substrate materials. Nickel mold inserts were made via excimer-laser ablation and Ni electrodeposition. Replication of structures, such as channels with different aspect ratios, were investigated and experimental results are discussed.

Publication type

Conference paper

Research centre

Swinburne University of Technology. Industrial Research Institute Swinburne

Source

Proceedings of SPIE: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, Melbourne, Victoria, Australia, 16 December 2002 / Dinesh K. Sood, Ajay P. Malshe and Ryutaro Maeda (eds.), pp. 82-92

Publication year

2002

Keyword(s)

Confocal microscopy;  Hot embossing;  Replication

Publisher

SPIE

ISSN

0277-786X (series ISSN)

Publisher URL

http://dx.doi.org/10.1117/12.469671

Copyright

Copyright © 2002 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 4936), and is available from: http://dx.doi.org/10.1117/12.469671. The published version is reproduced in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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