Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/193591

Download PDF (Published version) (Adobe Acrobat PDF, -1 bytes)

Title

Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography

Author(s)

Kondo, Toshiaki;  Juodkazis, Saulius;  Mizeikis, Vygantas;  Matsuo, Shigeki;  Misawa, Hiroaki

Abstract

Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.

Publication type

Journal article

Source

New Journal of Physics, Vol. 8 (Oct 2006), article no. 250

Publication year

2006

FOR Code(s)

02 Physical Sciences

Keyword(s)

Holographic lithography;  Laser pulses;  Micrometre range;  Microstructures;  Periodic dielectric structures;  Phase control;  Photoresistors;  SU-8;  Three-dimensional structures;  Ti: sapphire laser system

Publisher

Institute of Physics Publishing

ISSN

1367-2630

Publisher URL

http://dx.doi.org/10.1088/1367-2630/8/10/250

Copyright

Copyright © IOP Publishing Ltd and Deutsche Physikalische Gesellschaft. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher.

Full text

Peer reviewed