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Title

Optical transmission and laser structuring of silicon membranes

Author(s)

Juodkazis, Saulius;  Nishi, Yasufumi;  Misawa, Hiroaki;  Mizeikis, Vygantas;  Schecker, Olivier;  Waitz, Reimar;  Leiderer, Paul;  Scheer, Elke

Abstract

The optical linear and nonlinear properties of ~ 340-nm thick Si membranes were investigated. The investigation included both experiments in which the reflection and transmission from the membranes were measured, and finite differences time domain simulations. The linear optical transmission of the Si membranes can be controlled by changing the thickness of a thermally grown oxide on the membrane. Illumination of the membranes with high levels of irradiation leads to optical modifications that are consistent with the formation of amorphous silicon and dielectric breakdown. When irradiated under conditions where dielectric breakdown occurs, the membranes can be ablated in a well-controlled manner. Laser micro-structuring of the membranes by ablation was carried out to make micrometer-sized holes by focused fs-pulses. Ns-pulses were also used to fabricate arrays of holes by proximity-ablation of a closely-packed pattern of colloidal particles.

Publication type

Journal article

Source

Optics Express, Vol. 17, no. 17 (Aug 2009), pp. 15308-15317

Publication year

2009

FOR Code(s)

0205 Optical Physics;  0903 Biomedical Engineering;  1113 Ophthalmology and Optometry

Keyword(s)

Laser structuring;  Optical transmissions;  Silicon membranes

Publisher

Optical Society of America

ISSN

1094-4087

Publisher URL

http://dx.doi.org/10.1364/oe.17.015308

Copyright

Copyright © 2009 Optical Society of America. This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/oe.17.015308. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

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