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Title

Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8

Author(s)

Kondo, Toshiaki;  Juodkazis, Saulius;  Mizeikis, Vygantas;  Misawa, Hiroaki

Abstract

Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).

Publication type

Journal article

Source

Optics Express, Vol. 14, no. 17 (Aug 2006), pp. 7943-7953

Publication year

2006

FOR Code(s)

0205 Optical Physics;  0903 Biomedical Engineering;  1113 Ophthalmology and Optometry

Keyword(s)

Holographic lithography;  Laser beams;  Photonic crystals;  Photoresists;  SU-8;  Three-dimensional microstructures;  Two-dimensional microstructures

Publisher

Optical Society of America

ISSN

1094-4087

Publisher URL

http://dx.doi.org/10.1364/oe.14.007943

Copyright

Copyright © 2006 Optical Society of America. This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/oe.14.007943. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

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