Nano-photolithography using doughnut beam induced photoinhibition

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/196520

Title: Nano-photolithography using doughnut beam induced photoinhibition
Author(s): Cao, Yao-Yu; Gan, Zong-Song; Jia, Baohua; Evans, Richard A.; Gu, Min
Abstract: Conventional photolithography has difficulties in realising resolution higher than λ/2 of the illumination light due to the diffraction limit. We demonstrate an approach with a doughnut beam induced photoinhibition to improve the resolution for fabricating nanostructures.
Publication type: Conference paper
Research centre: Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Centre for Micro-Photonics
Source: Paper presented at the 19th Australian Institute of Physics Congress, Melbourne, Victoria, Australia, 05-09 December 2010 / Elisabetta Barberio and Peter Hannaford (eds.)
Publication year: 2010
Keyword(s): Nanofabrication; Photoinhibition; Photolithography; Photopolymersation
Publisher: Australian Institute of Physics
Publisher URL: http://www.aip.org.au/Congress2010/Abstracts.htm