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Title

High-photosensitive resin for super-resolution direct-laser-writing based on photoinhibited polymerization

Author(s)

Cao, Yaoyu;  Gan, Zongsong;  Jia, Baohua;  Evans, Richard A.;  Gu, Min

Abstract

An ethoxylated bis-phenol-A dimethacrylate based photoresin BPE-100 of relatively high photosensitivity and modulus is used for the creation of sub-50 nm features. This is achieved by using the direct laser writing technique based on the single-photon photoinhibited polymerization. The super-resolution feature is realized by overlapping two laser beams of different wavelengths to enable the wavelength-controlled activation of photoinitiating and photoinhibiting processes in the polymerization. The increased photosensitivity of the photoresin promotes a fast curing speed and enhances the photopolymerization efficiency. Using the photoresin BPE-100, we achieve 40 nm dots for the first time in the super-resolution fabrication technique based on the photoinhibited polymerization, and a minimum linewidth of 130 nm. The influence of the power of the inhibiting laser and the exposure time on the feature size is studied and the results agree well with the prediction obtained from a simulation based on a non-steady-state kinetic model.

Publication type

Journal article

Research centre

Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Centre for Micro-Photonics

Source

Optics Express, Vol. 19, no. 20 (Sep 2011), pp. 19486-19494

Publication year

2011

FOR Code(s)

0205 Optical Physics;  0903 Biomedical Engineering;  1113 Ophthalmology and Optometry

Keyword(s)

Laser-induced chemistry;  Polymers;  Optical fabrication;  Nanostructure fabrication;  Photosensitive materials

Publisher

Optical Society of America

ISSN

1094-4087

Publisher URL

http://dx.doi.org/10.1364/OE.19.019486

Copyright

Copyright © 2011 Optical Society of America. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OE.19.019486. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Research Projects

An accelerating journey to the new era of Petabyte optical memory systems, Australian Research Council grant number FL100100099
Functional micro multiplexers based on nonlinear three dimensional photonic crystal superprisms, Australian Research Council grant number DP0987006

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