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Title

Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses

Author(s)

Kondo, Toshiaki;  Matsuo, Shigeki;  Juodkazis, Saulius;  Mizeikis, Vygantas;  Misawa, Hiroaki

Abstract

Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.

Publication type

Journal article

Source

Applied Physics Letters, Vol. 82, no. 17 (Apr 2003), pp. 2758-2760

Publication year

2003

FOR Code(s)

02 Physical Sciences;  09 Engineering

Keyword(s)

Femtosecond laser pulses;  Laser microfabrication;  Multibeam interference;  Multiphoton absorption;  Multiphoton fabrication

Publisher

American Institute of Physics

ISSN

0003-6951

Publisher URL

http://dx.doi.org/10.1063/1.1569987

Copyright

Copyright © 2003 American Institute of Physics. Published version reproduced here with the kind permission of the publisher.

Full text

Peer reviewed