Home List of Titles Photo-electrochemical deposition of platinum on TiO2 with resolution of twenty nanometers using a mask elaborated with electron-beam lithography
Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/214873
- Photo-electrochemical deposition of platinum on TiO2 with resolution of twenty nanometers using a mask elaborated with electron-beam lithography
- Juodkazis, Saulius; Yamaguchi, Akira; Ishii, Hidekazu; Matsuo, Shigeki; Takagi, Hitoshi; Misawa, Hiroaki
- We report the patterning of Pt on a TiO2-rutile single crystal (the fundamental absorption band starts at 396 nm) by direct deposition from a water solution of H2PtCl6 (10–20 mmol/dm3) using laser beam writing at 390–396 nm, or by Hg-lamp illumination (i-line at 365 nm). Pt deposition was corroborated by microchemical analysis. A resolution of the Pt patterning down to 20-30 nm was achieved. To create a Pt pattern with resolution of twenty nanometers, we employed a mask elaborated with electron-beam (EB) drawing lithography. The mask was transparent to the writing illumination. The Pt was reduced from the solution by laser beam scanning over resist-covered regions, while the pattern was formed in the openings of the resist. Separation of the growth and illumination regions, typically, by 0.5–2 µm, facilitates the deposition of reproducible, high-aspect ratio patterns. It is demonstrated that Pt was deposited through a process of diffusion of the light-excited carriers. The possibility of fabrication of a three-dimensional Pt pattern by the overgrowth of the resist is discussed.
- Publication type
- Journal article
- Japanese Journal of Applied Physics: Part 1: Regular Papers, Short Notes and Review Papers, Vol. 40, no. 6A (Jun 2001), pp. 4246-4251
- Publication year
- FOR Code(s)
- 01 Mathematical Sciences; 02 Physical Sciences
- Laser-assisted deposition; Microfabrication; Platinum; Titania
- Japan Society of Applied Physics
- Publisher URL
- Copyright © 2001 The Japan Society of Applied Physics.
- Peer reviewed