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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/214920
- Efficient microvalve driven by a Si-Ni bimorph
- Tomonari, Shigeaki; Yoshida, Hitoshi; Kamakura, Masanao; Yoshida, Kazushi; Kawahito, Keiko; Saitoh, Masaaki; Kawada, Hiroshi; Juodkazis, Saulius; Misawa, Hiroaki
- We report on a new type of high-throughput thermally driven microvalve fabricated by using micro-electromechanical system (MEMS) technology. A miniaturized Si–Ni bimorph actuator was incorporated into the valve structure. This allowed the realization of both larger force generation and a longer stroke (the actuation length) combined with shortened response time. Also, a low-voltage actuation (<3 V) and low-energy consumption (<0.2 W) were achieved. The actual size of the fabricated valve is 7.3 ×5.8 ×1.2 mm3. The flow rate of 0 to 500 cm3/min at an air pressure of 47 kPa with a low leakage rate of 0.03 cm3/min and good linearity of air pressure control were achieved. The principles of design and experimental results on flow rate control are presented and discussed.
- Publication type
- Journal article
- Japanese Journal of Applied Physics: Part 1: Regular Papers, Short Notes and Review Papers, Vol. 42, no. 7A (Jul 2003), pp. 4593-4597
- Publication year
- FOR Code(s)
- 01 Mathematical Sciences; 02 Physical Sciences
- Bimorph; MEMS; Microelectromechanical systems; Thermal expansion
- Japan Society of Applied Physics
- Publisher URL
- Copyright © 2003 The Japan Society of Applied Physics.
- Peer reviewed