Efficient microvalve driven by a Si-Ni bimorph

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Efficient microvalve driven by a Si-Ni bimorph

Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/214920

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Title: Efficient microvalve driven by a Si-Ni bimorph
Author(s): Tomonari, Shigeaki; Yoshida, Hitoshi; Kamakura, Masanao; Yoshida, Kazushi; Kawahito, Keiko; Saitoh, Masaaki; Kawada, Hiroshi; Juodkazis, Saulius; Misawa, Hiroaki
Abstract: We report on a new type of high-throughput thermally driven microvalve fabricated by using micro-electromechanical system (MEMS) technology. A miniaturized Si–Ni bimorph actuator was incorporated into the valve structure. This allowed the realization of both larger force generation and a longer stroke (the actuation length) combined with shortened response time. Also, a low-voltage actuation (<3 V) and low-energy consumption (<0.2 W) were achieved. The actual size of the fabricated valve is 7.3 ×5.8 ×1.2 mm3. The flow rate of 0 to 500 cm3/min at an air pressure of 47 kPa with a low leakage rate of 0.03 cm3/min and good linearity of air pressure control were achieved. The principles of design and experimental results on flow rate control are presented and discussed.
Publication type: Journal article
Source: Japanese Journal of Applied Physics: Part 1: Regular Papers, Short Notes and Review Papers, Vol. 42, no. 7A (Jul 2003), pp. 4593-4597
Publication year: 2003
FOR Code(s): 01 Mathematical Sciences; 02 Physical Sciences
Keyword(s): Bimorph; MEMS; Microelectromechanical systems; Thermal expansion
Publisher: Japan Society of Applied Physics
ISSN: 0021-4922
Publisher URL: http://dx.doi.org/10.1143/jjap.42.4593
Peer reviewed