Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/214998

Title: Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications
Author(s): Juodkazis, Saulius; Yamasaki, Kazuhiko; Marcinkevicius, Andrius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki; Lippert, Thomas
Abstract: We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass by a combination of femtosecond laser microfabrication and chemical wet etching techniques. It is demonstrated that fabrication of interconnected network of channels having lengths of about 200 mum, and diameters as small as 10 gm is possible due to the enhanced etching selectivity (typically 20 - 60) in the laser-irradiated regions. Thus, it becomes feasible to form 3D micro-fluidic and photonic crystal structures in transparent glass-like materials using this approach. In addition, preliminary results on microstructuring of rubber are presented.
Publication type: Conference paper
Source: MRS Proceedings: proceedings of the Materials Science of Microelectromechanical Systems (Mems) Devices IV Symposium, Boston, United States, 25-28 November 2001, Vol. 687, pp. 173-178
Publication year: 2001
Keyword(s): Femtosecond irradiation; Glasses; MEMS applications; Microstructuring; Polymethylmethacrylate; Silica
Publisher: Cambridge University Press
ISBN: 0272-9172
Publisher URL: http://dx.doi.org/10.1557/PROC-687-B5.25
Peer reviewed