Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/215004

Download PDF (Published version) (Adobe Acrobat PDF, -1 bytes)

Title

Femtosecond laser-assisted three-dimensional microfabrication in silica

Author(s)

Marcinkevicius, Andrius;  Juodkazis, Saulius;  Watanabe, Mitsuru;  Miwa, Masafumi;  Matsuo, Shigeki;  Misawa, Hiroaki;  Nishii, Junji

Abstract

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10μm -diameter channels in a 100μm -thick silica slab).

Publication type

Journal article

Source

Optics Letters, Vol. 26, no. 5 (Mar 2001), pp. 277-279

Publication year

2001

FOR Code(s)

0205 Optical Physics;  0206 Quantum Physics;  0906 Electrical and Electronic Engineering

Keyword(s)

Femtosecond lasers;  Silica glass;  Three-dimensional microfabrication

Publisher

Optical Society of America

ISSN

0146-9592

Publisher URL

http://dx.doi.org/10.1364/OL.26.000277

Copyright

Copyright © 2001 Optical Society of America. This paper was published in Optics Letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OL.26.000277. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Full text

Peer reviewed