High-quality templates of three-dimensional woodpile photonic crystals are fabricated in photoresist SU-8 by use of femtosecond laser lithography. The samples have smooth surfaces, are mechanically stable, and are resistant to degradation under environmental and chemical influences. Fundamental and higher-order photonic stopgaps are identified in the wavelength range 2.0–8.0μm . These templates can be used for subsequent infiltration by optically active or high-refractive-index materials.
Optics Letters, Vol. 29, no. 17 (Sep 2004), pp. 2061-2063