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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/215084
- Title
- Three-dimensional microfabrication by femtosecond pulses in dielectrics
- Author(s)
- Kondo, Toshiaki; Yamasaki, Kazuhiko; Juodkazis, Saulius; Matsuo, Shigeki; Mizeikis, Vygantas; Misawa, Hiroaki
- Abstract
- We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.
- Publication type
- Journal article
- Source
- Thin Solid Films: proceedings of 'Photonic Processing of Surfaces, Thin Films and Devices,' the European Materials Research Society 2003 Spring Conference (E-MRS 2003), Strasbourg, France, 10-11 June 2003, Vol. 453-454 (Apr 2004), pp. 550-556
- Publication year
- 2004
- FOR Code(s)
- 02 Physical Sciences; 09 Engineering; 10 Technology
- Keyword(s)
- Dielectric breakdown; Direct laser writing; Femtosecond laser microfabrication; Holographic recording; Micro-fabrication; Nano-fabrication; PMMA; Polymers; Polymethylmethacrylate; Thin films
- Publisher
- Elsevier
- ISSN
- 0040-6090
- Publisher URL
- http://dx.doi.org/10.1016/j.tsf.2003.11.180
- Copyright
- Copyright © 2003 Elsevier B.V. All rights reserved.
- Peer reviewed
