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- Three-dimensional recording by femtosecond pulses in dielectrics
- Juodkazis, Saulius; Kondo, Toshiaki; Mizeikis, Vygantas; Matsuo, Shigeki; Murata, Hiroyuki; Misawa, Hiroaki
- Fabrication and characteristics of two-dimensional (2D) and three-dimensional (3D) periodic structures, recorded in the bulk of SU8 photoresist film by multiple-beam interference is described. Multiple beams (up to nine.) were generated by a diffractive beam splitter. Recording was performed by ultrashort laser pulses with temporal width of 140 fs (FVWM) and central wavelength of 800 nm, derived from a Ti:sapphire laser. Intensity-dependent photomodification of the photoresist was due to single-photon as well as multi-photon (two and three) absorption. After the development, the exposed resist films contained free-standing 2D and 3D periodic dielectric structures with unexposed exposed regions removed by the development. Detailed examination of the samples has revealed close resemblance between their structure and the light intensity distributions in the multiple-beam interference. fields, expected from the numerical calculations. Quality of the samples recorded by a single-photon absorption was lower than that of that of other samples, in particular due to poor development quality. The microfabrication method used in this work appears to be a suitable for obtaining photonic crystal templates.
- Publication type
- Conference paper
- Proceedings of SPIE: Photon Processing in Microelectronics and Photonics II, San Jose, United States, 27-30 January 2003 / Alberto Pique, Koji Sugioka, Peter R. Herman, Jim Fieret et. al. (eds.), Vol. 4977, pp. 94-107
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- Femtosecond pulses; Holographic recording; Photonic crystals
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- Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 4977), and is available from: http://dx.doi.org/10.1117/12.479405. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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- Peer reviewed