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Title

Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Author(s)

Juodkazis, Saulius;  Horyama, Makoto;  Miwa, Masafumi;  Watanabe, Mitsuru;  Marcinkevieius, Andrius;  Mizeikis, Vygantas;  Matsuo, Shigeki;  Misawa, Hiroaki

Abstract

We review applications of photopolymerization and photodamage by tightly focused picosecond and femtosecond pulses for the formation of three-dimensional structures. Laser microfabrication of various structures, like surface gratings, 3D optical memory, 2D and 3D photonic crystals, 3D micro-fluidic systems, etc. are described. Microfabrication by laser irradiation provides new opportunities to realize microstructures and microdevices, highly demanded in a number of fields, e.g., microchemistry, information storage, and photonics. The background of this technique is very simple, and relies on modification of materials by intense, strongly focused laser irradiation. In this highly spatially localized region, the material may become destroyed, solidified from liquid, or otherwise photomodified, and complex structures can be formed from many photomodified regions. Below, we describe techniques, applications, and achievements of laser microstructuring in liquid resins and solid silica glasses.

Publication type

Conference paper

Source

Proceedings of SPIE: proceedings of the Seventh International Conference on Laser and Laser-Information Technologies, Suzdal, Russia, 20-26 June 2001 / Vladislav Y. Panchenko and Vladimir S. Golubev (eds.), Vol. 4644, pp. 27-38

Publication year

2001

Keyword(s)

Defects;  Direct laser writing;  Light-induced damage threshold;  Photopolymerization;  Silica;  Time-resolved measurements

Publisher

SPIE

ISBN

0277-786X

Publisher URL

http://dx.doi.org/10.1117/12.464145

Copyright

Copyright © 2002 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 4644), and is available from: http://dx.doi.org/10.1117/12.464145. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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