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Title

Design of modern nanofabrication facilities

Author(s)

Beswick, Sarah;  Smith, Andrew;  Morrish, Dru;  Day, Daniel J.;  Juodkazis, Saulius;  Gu, Min

Abstract

We present a set of practical rules critical for designing and building a modern nanotechnology laboratory, focused on photonic applications in a cleanroom environment. We show the impacts on time, cost and quality of early design decisions and its importance on achieving the final fully functional laboratory. Best practice examples are presented for setting up a modern laboratory/facility, following analysis of the time, cost and quality constraints. The case study presented is the engineering and architectural solution of the nanofabrication cleanroom facility in the Advanced Technology Centre at Swinburne University of Technology, Australia. Set of practical rules is established for the cost and time efficient set up of the nanotechnology facilities for the research and development.

Publication type

Conference paper

Research centre

Swinburne University of Technology. Facilities and Services Group

Research centre

Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Centre for Micro-Photonics

Source

Proceedings of the SPIE Smart Nano-Micro Materials and Devices Forum, Hawthorn, Victoria, Australia, 04-07 December 2011 / Saulius Juodkazis and Min Gu (eds.), Vol. 8204, paper no. 82043K

Publication year

2011

Keyword(s)

Advanced Technologies Centre;  Cleanrooms;  Laboratory design;  Nanofabrication;  Nanotechnology;  Research facility design

Publisher

SPIE

ISSN

0277-786X (series ISSN)

ISBN

9780819488459, 0819488453

Publisher URL

http://dx.doi.org/10.1117/12.904711

Copyright

Copyright © 2011 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (Vol. 8204), and is available from: http://dx.doi.org/10.1117/12.904711. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Full text

Peer reviewed