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Title

Dynamic modeling of superresolution photoinduced-inhibition nanolithography

Author(s)

Gan, Zongsong;  Cao, Yaoyu;  Jia, Baohua;  Gu, Min

Abstract

A dynamical model based on the photo-physics and photochemistry processes for superresolution photoinduced-inhibition nanolithography (SPIN) under both single-photon and two-photon excitation is developed and validated by experimental results. Numerical simulation results for the dot fabrication predict that the theoretical single dot size can be infinitely reduced, which shows diffraction-unlimited feature of the SPIN. A small reaction constant of the inhibitor polymerization is crucial to realize a small dot size and high resolution. It is discovered both theoretically and experimentally that the dot minimum size and best resolution occur under different inhibition beam powers because of the influence from the inhibitor polymerization. Moreover, due to the consumption of the photo-inhibitor molecules in the inhibition process, the dot size may vary during the sequential fabrication.

Publication type

Journal article

Research centre

Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Centre for Micro-Photonics. Centre for Ultrahigh-bandwidth Devices for Optical Systems

Source

Optics Express, Vol. 20, no. 15 (Jul 2012), pp. 16871-16879

Publication year

2012

FOR Code(s)

0205 Optical Physics;  0906 Electrical and Electronic Engineering;  1005 Communications Technologies

Keyword(s)

Dynamic modeling;  Superresolution photoinduced-inhibition nanolithography

Publisher

Optical Society of America

ISSN

1094-4087

Publisher URL

http://dx.doi.org/10.1364/oe.20.016871

Copyright

Copyright © 2012 Optical Society of America. This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/oe.20.016871. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Research Projects

An accelerating journey to the new era of Petabyte optical memory systems, Australian Research Council grant number FL100100099
Functional micro multiplexers based on nonlinear three dimensional photonic crystal superprisms, Australian Research Council grant number DP0987006

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