Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/231715

Title

Plasma immersion ion implantation of steels

Author(s)

Collins, G. A.;  Hutchings, R.;  Tendys, J.

Abstract

Plasma immersoin ion implantation (PI3) is a new technique with certain advantages over conventional ion implantation. We have developed an implanter based on an inductively coupled r.f. glow discharge plasma. Ion densities of 1010 cm-3 are obtained with filling pressures of about 10-3 mbar. Ions are accelerated from the plasma by high voltage pulses (typically - 45 kV) applied directly to the work-piece. In this paper we report on the application of PI3 to nitrogen implantation in steels. Dramatic increases in microhardness and wear resistance have been observed for a number of steels, ranging from 0.3 wt.% C mild steel to austenitic stainless steels. Despite the relatively implantation energy, the modified layer can be greater than 1 μ m in thickness. The nitrogen concentration profile can be controlled by the implantation temperature and dose. Glancing-angle X-ray diffraction has been used to determine the structural changes that occur in the surface layer.

Publication type

Journal article

Source

Materials Science and Engineering: A, Vol. 139, no. C (Jul 1991), pp. 171-178

Publication year

1991

FOR Code(s)

0912 Materials Engineering;  0913 Mechanical Engineering

Keyword(s)

Austenitic stainless steels;  Glow discharges;  Implanter;  Inductively coupled RF glow discharge plasma;  Microhardness;  Mild steel;  Nitrogen;  Plasma applications;  Plasma immersion ion implantation;  Steel wear resisting;  Wear resistance;  X-ray diffraction

Publisher

Elsevier

ISSN

0921-5093

Publisher URL

http://dx.doi.org/10.1016/0921-5093(91)90613-R

Copyright

Copyright © 1991 Elsevier B.V.

Peer reviewed