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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/231715
- Plasma immersion ion implantation of steels
- Collins, G. A.; Hutchings, R.; Tendys, J.
- Plasma immersoin ion implantation (PI3) is a new technique with certain advantages over conventional ion implantation. We have developed an implanter based on an inductively coupled r.f. glow discharge plasma. Ion densities of 1010 cm-3 are obtained with filling pressures of about 10-3 mbar. Ions are accelerated from the plasma by high voltage pulses (typically - 45 kV) applied directly to the work-piece. In this paper we report on the application of PI3 to nitrogen implantation in steels. Dramatic increases in microhardness and wear resistance have been observed for a number of steels, ranging from 0.3 wt.% C mild steel to austenitic stainless steels. Despite the relatively implantation energy, the modified layer can be greater than 1 μ m in thickness. The nitrogen concentration profile can be controlled by the implantation temperature and dose. Glancing-angle X-ray diffraction has been used to determine the structural changes that occur in the surface layer.
- Publication type
- Journal article
- Materials Science and Engineering: A, Vol. 139, no. C (Jul 1991), pp. 171-178
- Publication year
- FOR Code(s)
- 0912 Materials Engineering; 0913 Mechanical Engineering
- Austenitic stainless steels; Glow discharges; Implanter; Inductively coupled RF glow discharge plasma; Microhardness; Mild steel; Nitrogen; Plasma applications; Plasma immersion ion implantation; Steel wear resisting; Wear resistance; X-ray diffraction
- Publisher URL
- Copyright © 1991 Elsevier B.V.
- Peer reviewed