Ablation rate of polymers in laser ablation-based microfabrication depends on both laser parameters and polymer characteristics. This study aims to establish a scaling relationship linking the ablation rate and the properties of polymers commonly used in microfluidics. Ablation rate of polymers was determined experimentally using 193nm, 248nm and 308nm radiations. Polymer descriptors included thermal and surface properties. Statistical analysis was carried out for laser fluence against various polymer descriptors and/or their combinations. Analysis results show a relatively high correlation coefficient of 0.82 for the polymer ablation data when we compare fluence against the product of ablation rate and the difference between glass transition temperature and room temperature.
Proceedings of SPIE BioMEMS and Smart Nanostructures, Symposium on Microelectronics and MEMS, Adelaide, South Australia, Australia, 17 December 2001, Symposium on Microelectronics and MEMS,
Vol. 4590 (2001), pp. 179-186