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Title

A 3D visualization tool for excimer laser micromachining

Author(s)

Mutapcic, Emir;  Iovenitti, Pio;  Harvey, Erol

Abstract

Abstract not reproduced here by request of the publisher. The text is available from: http://dx.doi.org/10.1117/12.418761.

Publication type

Conference paper

Research centre

Swinburne University of Technology. Industrial Research Institute Swinburne

Source

Proceedings of SPIE: 'Smart electronics and MEMS II', Symposium on Smart Materials and MEMS, Melbourne, Victoria, Australia, 13 December 2001, Vol. 4236, pp. 230-241

Publication year

2001

Publisher

SPIE

Publisher URL

http://dx.doi.org/10.1117/12.418761

Copyright

Copyright © 2001 Society of Photo-Optical Instrumentation Engineers. This paper was originally published in Proceedings of SPIE (vol. 4236, pp. 230-241), and is available from: http://dx.doi.org/10.1117/12.418761. The published version of the paper is reproduced here in accordance with the copyright policy of the publisher. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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