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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/4044
- Title
- Laser-LIGA for serpentine Ni microstructures
- Author(s)
-
Davies, Sam T.;
Dowling, Andrew;
Ghantasala, Muralidhar K.;
Harvey, Erol C.;
Hayes, Jason P.;
Jin, Hengyi;
Solomon, Matthew D.
- Abstract
- Abstract not available.
- Publication type
- Conference paper
- Research centre
- Swinburne University of Technology. Industrial Research Institute Swinburne
- Source
-
SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems 2001, Adelaide, South Australia,
Vol. 4592, pp. 166-171
- Publication year
- 2001
- Publisher
- SPIE
- Publisher URL
- http://dx.doi.org/10.1117/12.448962
- Copyright
- ©2003 COPYRIGHT SPIE--The International Society for Optical Engineering.
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