Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/4045

Title

Influence of patterning geometry on the electrodeposition of microstructures fabricated by laser-LIGA

Author(s)

Davies, Sam T.;  Ghantasala, Muralidhar K.;  Harvey, Erol C.;  Hayes, Jason P.;  Jin, Hengyi

Abstract

This paper describes recent experimental studies on the effect of patterning geometry on the laser machining parameters and electrodeposition rate of nickel microstructures fabricated using laser LIGA. The effect of shape, size and spacing of features has been studied for structures plated into Laminar AX moulds. In contrast to previous work, which has concentrated on low aspect ratio (< 0.1) geometries or on large (> 1 mm) structures, we specifically address here problems relating to aspect ratios in the range 0.14 - 8.75 and feature sizes of ~ 4 micrometers to 200 micrometers . Mould structures and plated features have been examined using optical, scanning electron and laser scanning confocal microscopy. Results show that for features >50 micrometers , the thickness profile of plated shapes varies by approximately +/- 1 micrometers m over most of the surface area with the edges demonstrating corner rounding with a radius ~ 5 micrometers . Below 20 micrometers in size, thickness profiles become peaked towards the center of a feature. A surface roughness (Ra) of ~ 1.0 micrometers is also observed. The reduction in deposition rate over the 3 hour electroforming process has also been explained in terms of an increase in plating area due to the profile of the laser ablated moulds.

Publication type

Conference paper

Research centre

Swinburne University of Technology. Industrial Research Institute Swinburne

Source

SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems 2001, Adelaide, South Australia, 17 December 2001, Vol. 4592, pp. 489-496

Publication year

2001

Publisher

SPIE

Publisher URL

http://dx.doi.org/10.1117/12.449006

Copyright

©2003 COPYRIGHT SPIE--The International Society for Optical Engineering.