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Home List of Titles Developing design rules for fabricating microdevices with an integrated micro-sorption pump for vacuum generation: a theoretical study
Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/495
- Developing design rules for fabricating microdevices with an integrated micro-sorption pump for vacuum generation: a theoretical study
- Barber, Richard L.; Harvey, Erol C.; Turney, Terence W.; Ghantasala, Muralidhar K.
- Many scientific instruments require a reduced pressure environment for operation. Recent developments of single chip, micro-sized instruments, such as the micro-mass spectrometer, have challenged the conventional vacuum pump’s capability to generate this environment. A solution to this challenge would be a device designed to incorporate the vacuum capability within the micro-chip. This requires a change in the conventional approach from designing a modular based vacuum pump to designing a microsystem in conjunction with the vacuum capability, specifically engineered for the micro-instrument’s application. The feasibility of integrating a micro-sorption pump within a microinstrument device is demonstrated in this theoretical study. A model which relates each of the vacuum parameters, mean-free-path, pressure, volume, critical dimension and temperature, is derived for the adsorbent Spherocarb.
- Publication type
- Journal article
- Research centre
- Swinburne University of Technology. Faculty of Engineering and Industrial Sciences. Industrial Research Institute Swinburne
- Journal of micromechanics and microengineering, Vol. 15, no. 12 (2005), pp. 2346-2352
- Publication year
- Institute of Physics Publishing
- pp. 2346-2352
- Publisher URL
- Journal of micromechanics and microengineering
- Publisher URL
- © 2005 IOP Publishing Ltd.
- Peer reviewed