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Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/39703
- Feedback and control of micropumps
- Tomac, Tom; Toncich, Dario J.; Harvey, Erol C.; Hayes, Jason P.; Overmars, Anthony H.
- This research program relates to feedback and control of micro-electromechanical system (MEMS) components, which may include reaction chambers, pumps, valves mixers, heaters, diffusers, nozzles, channels, fluidic interconnections and others that may be integrated in a microfluidic system and applied to medical and chemical diagnostic devices, and any devices requiring liquid-or gas-filled chambers for operation. For the purpose of this study, a micropump constructed from no-moving parts (NMP) valves, driven by a piezoelectric element membrane and bonded to a flexible diaphragm is characterized by a Laser Interferometer. In order to predict the pump's performance, a non-contact displacement measurement fibre optic interferometer is used which, when applied, dynamically characterises the pump's open loop parameters. It is intended that the steady-state parameters be mapped into the closed-loop control elements, based on continuous measurement and adaptive compensation so that the pump performance criteria are always satisfied.
- Publication type
- Conference paper
- Research centre
- Swinburne University of Technology. Industrial Research Institute Swinburne
- Profiles in Industrial Research: Knowledge and Innovation 2002, St Kilda, Victoria, Australia, 15-19 July 2002, pp. 128-138
- Publication year
- Laser interferometer; MEMS; Micro electromechanical systems; Micropumps; NMP valves; No-moving parts valves
- Industrial Research Institute Swinburne, Swinburne University of Technology
- Publisher URL
- Additional information
- The authors would like to thank Paul Stoddart and Alex Mazzolini of Centre for Imaging and Applied Optics (CIAO) at School of Biophysical Sciences and Electrical Engineering (BSEE) Swinburne, for the technical support in the field of optics.