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Home List of Titles Fabrication of 3D high aspect ratio micro-fluidic components using laser machining and LIGA
Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.3/39708
- Fabrication of 3D high aspect ratio micro-fluidic components using laser machining and LIGA
- Barber, Richard L.; Ghantasala, Muralidhar K.; Turney, Terence W.; Harvey, Erol C.
- The fabrication of a microdevice often requires the combination of several techniques in its processing sequence. This allows for the benefits of individual techniques to fabricate an optimised product. In this paper, we present a complementary process involving laser micromachining and LIGA for the fabrication of a microflask. Examples of the benefits of this tandem include the removal of resist by a chemical free process (laser machining) and the fabrication of high aspect ratio structures with smooth wall surfaces (LIGA). A microflask fabricated with this process would have a potential application in a microfluidic system; for example, as a reservoir.
- Publication type
- Conference paper
- Research centre
- Swinburne University of Technology. Industrial Research Institute Swinburne
- Profiles in Industrial Research: Knowledge and Innovation 2002, St Kilda, Victoria, Australia, 15-19 July 2002, pp. 189-196
- Publication year
- Fabrication; LIGA; Lithography Galvanoformung Abformung
- Industrial Research Institute Swinburne, Swinburne University of Technology
- Publisher URL
- Additional information
- The authors would like to acknowledge the grant received from ASRP for doing the LIGA work at APS. Support received from CRC for Microtechnology is also gratefully acknowledged. The authors also thank the colleagues in the Microsystems Technology group at IRIS for their help and support.